D. Aryanto, R.M. Maulana, T. Sudiro, Masturi, A.S. Wismogroho, P. Sebayang, M. Ginting, P. Marwoto
ZnO thin film was deposited on a corning glass substrate using a sol-gel spin-coating method. The effect of post-thermal annealing on the structural of ZnO thin film was determined using scanning electron microscopy (SEM) and X-ray diffraction (XRD) measurements. The results showed that the films thickness was around 320 nm with polycrystalline hexagonal wurtzite structure. From the XRD measurement, it was found that the (002) diffraction peak increases by the increase of post-thermal annealing. It indicated that the films grow along the c-axis with a preferential orientation of (002). The calculation of all parameters from the XRD data, such as texture coefficient (TC), crystalline size (D), lattice strain (ϵ), dislocation density (ρ) indicated that the post-thermal annealing significantly affect the crystalline structures. © 2017 Author(s).
Research Center for Physics, LIPI, Serpong, 15314, Indonesia; Physics Department, Faculty of Mathematics and Natural Sciences, Universitas Negeri Semarang, Sekaran, Gunungpati, Semarang, 50229, Indonesia
