Synthesis and characterization of InGaAs nanowires grown by MOCVD

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D. Gustiono, E. Wibowo, Z. Othaman

2013 Journal of Physics: Conference Series Vol. 423 Issue 1 Conference paper Cited by 10 SDG 9SDG 17 Quartile

Abstract

Semiconductor nanowires have been intensively investigated in order to study their unique fundamental and application properties that develop at the nano-scale. One of main problems in the growth of III-V semiconductor nanowire is uniformity both of in dimension and composition of chemical elements. We synthesized InGaAs nanowire on GaAs (111) substrate at 400 °C-480 °C temperatures for 30 minutes using MOCVD. The nanowires grow perpendicular to the substrate via direct impinging mechanism and they have hexagonal shape with diameter of 80-150 nm. Dimension of nanowire, length and diameter, increase with increases of growth temperature. Formations of tapering could be controlled with growth at lower temperature. © IOP Publishing Ltd 2013.

Affiliations

Ibnu Sina Institute for Fundamental Science Studies, Universiti Teknologi Malaysia, 81310 UTM Skudai, Johor, Malaysia; Agency for Assessment and Application of Technology, BPPT Second Building, Jakarta 10340, Indonesia; Department of Physics, Faculty of Mathematic and Science, Universitas Negeri Semarang, Semarang, Indonesia

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